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    Hierarchical distributed simulation for 300mm wafer fab
    13 years 6 months ago
    Hierarchical distributed simulation for 300mm wafer fab
    Download  www.informs-sim.org
    Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in ...
    Sheng Xu, Leon F. McGinnis
    claim paper
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