wafer fabrication facility

WSC
2000

128views Modeling And Simulation» more WSC 2000»

Simulation based decision support for future 300mm automated material handling

13 years 5 months ago

Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...

Mathias Schulz, Timothy D. Stanley, Bernhard Renel...

claim paper

Read More »

click to vote

WSC
2001

123views Modeling And Simulation» more WSC 2001»

Critical tools identification and characteristics curves construction in a wafer fabrication facility

13 years 5 months ago

Download www.informs-sim.org

The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in p...

Dima Nazzal, Mansooreh Mollaghasemi

claim paper

Read More »

Sciweavers

Explore & Download

Productivity Tools

Document Tools

Image Tools

Sciweavers