Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors

This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The silicon based sensor system consists of piezoresistive mechanical stress transducers integrated in thin membrane hinges supporting a suspended flexible cross structure. The mechanical behavior of the fragile micromechanical structure is analyzed for both static and dynamic load cases. This work demonstrates that the silicon microstructure withstands stat

• Type: Journal
• Year: 2007
• Where: CORR
• Authors: Stefan Spinner, J. Bartholomeyczik, Bernd Becker, M. Doelle, O. Paul, Ilia Polian, R. Roth, K. Seitz, P. Ruther
• Keywords: CORR 2007, Education, Silicon Based Sensor, Systematic Electromechanical Characterization, Three-axial Force Sensor