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5

ISBI
2004
IEEE

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Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization

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Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization

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Lingli Liu, Osama Mukdadi, Hyoung Bum Kim, Jean R.

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Atomic Layer Deposition | ISBI 2004 | Medical Imaging |

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Added	20 Nov 2009
Updated	20 Nov 2009
Type	Conference
Year	2004
Where	ISBI
Authors	Lingli Liu, Osama Mukdadi, Hyoung Bum Kim, Jean R. Hertzberg, Robin Shandas, Victor Bright

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