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WSC
2001

Critical tools identification and characteristics curves construction in a wafer fabrication facility

11 years 9 months ago
Critical tools identification and characteristics curves construction in a wafer fabrication facility
The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in process and in demand for the next few years. Moreover, the goal was to construct the characteristics curves that would provide information about the different capabilities of a wafer fabrication facility for several improvement scenarios. A valid simulation model of the whole production line of the fabrication facility was built. The input factors in the fab that significantly affect cycle time, were identified through factor screening experiments. Based on these factors, several scenarios involving addition of tools, were identified and the characteristics curves were constructed for each scenario. These characteristics curves were used to relate cycle time to production volume capacities.
Dima Nazzal, Mansooreh Mollaghasemi
Added 31 Oct 2010
Updated 31 Oct 2010
Type Conference
Year 2001
Where WSC
Authors Dima Nazzal, Mansooreh Mollaghasemi
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