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11

ITC
1998
IEEE

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A performance analysis system for MEMS using automated imaging methods

13 years 9 months ago

A performance analysis system for MEMS using automated imaging methods

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The ability to make in-situ performance measurements of MEMS operating at high speeds has been demonstrated using a new image analysis system. Significant improvements in performance and reliability have directly resulted from the use of this system.

Glenn F. LaVigne, Sam L. Miller

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Hardware | Image Analysis System | In-situ Performance Measurements | ITC 1998 | Significant Improvements |

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Added	05 Aug 2010
Updated	05 Aug 2010
Type	Conference
Year	1998
Where	ITC
Authors	Glenn F. LaVigne, Sam L. Miller

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