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ITC
1998
IEEE
69
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ITC 1998
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A performance analysis system for MEMS using automated imaging methods
14 years 3 months ago
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mems.sandia.gov
The ability to make in-situ performance measurements of MEMS operating at high speeds has been demonstrated using a new image analysis system. Significant improvements in performa...
Glenn F. LaVigne, Sam L. Miller
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