4 search results - page 1 / 1 » A review of scheduling theory and methods for semiconductor ... |
WSC
2008
13 years 7 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
WSC
2004
13 years 6 months ago
2004
Simulation methods are extensively used in modeling complex scheduling problems. However, traditional layout of simulation models can become complicated when they are used to find...
ICRA
2007
IEEE
13 years 11 months ago
2007
IEEE
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...
TASE
2008
IEEE
13 years 4 months ago
2008
IEEE
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...