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TASE
2011
IEEE
12 years 12 months ago
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation
—For multiclass flow line models, we identify a class of service times that allow a decomposition of the system into subsets of servers called channels. In each channel, the cus...
James R. Morrison
WSC
2000
13 years 6 months ago
Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environmen
Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in t...
Jeffrey W. Herrmann, Brian F. Conaghan, Laurent He...
WSC
2004
13 years 6 months ago
Improving the Performance of Dispatching Rules in Semiconductor Manufacturing by Iterative Simulation
In this paper, we consider semiconductor manufacturing processes that can be characterized by a diverse product mix, heterogeneous parallel machines, sequence-dependent setup time...
Lars Mönch, Jens Zimmermann
WSC
2008
13 years 7 months ago
Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
Long cycle times in semiconductor manufacuring represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot si...
Kilian Schmidt, Oliver Rose
WSC
2004
13 years 6 months ago
Simulation-Based Advanced WIP Management and Control in Semiconductor Manufacturing
We develop a hierarchical distributed production planning and control methodology, called DISCS, for a large and unstable semiconductor manufacturing process. The upper layer of D...
Kazuo Miyashita, Tsukasa Okazaki, Hirofumi Matsuo