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46
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Crosstalk analysis in nanometer technologies
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Density gradient minimization with coupling-constrained dummy fill for CMP control
14 years 15 days ago
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In the nanometer IC design, dummy fill is often performed to improve layout pattern uniformity and the post-CMP quality. However, filling dummies might greatly increase intercon...
Huang-Yu Chen, Szu-Jui Chou, Yao-Wen Chang
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