2 search results - page 1 / 1 » Design and Fabrication of the Suspended High-Q Spiral Induct... |
CORR
2008
Springer
13 years 5 months ago
2008
Springer
In this paper, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic solve...
CORR
2008
Springer
13 years 5 months ago
2008
Springer
We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS o...