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MJ
2006
173views more  MJ 2006»
13 years 4 months ago
Diaphragm design guidelines and an optical pressure sensor based on MEMS technique
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...
Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry...
MJ
2008
82views more  MJ 2008»
13 years 4 months ago
Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor
This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber ...
Yan Sun, Ganhua Feng, George Georgiou, Edip Niver,...