2 search results - page 1 / 1 » Electrostatically-Driven Resonator on Soi with Improved Temp... |
CORR
2007
Springer
13 years 4 months ago
2007
Springer
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant ...
ISCAS
2005
IEEE
13 years 10 months ago
2005
IEEE
— The paper describes a 4-MHz temperature compensated reference oscillator based on a capacitive silicon micro-mechanical resonator. The design of the resonator has been optimize...