20 search results - page 2 / 4 » MEMS Fabrication |
CORR
2008
Springer
13 years 5 months ago
2008
Springer
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important...
CORR
2008
Springer
13 years 4 months ago
2008
Springer
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vi...
ISCAS
2006
IEEE
13 years 11 months ago
2006
IEEE
— We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-ona-chip to co...
MJ
2007
13 years 4 months ago
2007
This paper presents a new vibration-based electromagnetic micro power generator fabricated using microelectromechanical systems (MEMS) technology, which can convert ambient vibrat...
CORR
2007
Springer
13 years 5 months ago
2007
Springer
This paper considers a developing theory on the effects of inevitable process variations during the fabrication of MEMS and other microsystems. The effects on the performance and ...