19 search results - page 1 / 4 » Scheduling Analysis of Cluster Tools with Buffer Process Mod... |
ICRA
2007
IEEE
13 years 11 months ago
2007
IEEE
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...
TASE
2008
IEEE
13 years 4 months ago
2008
IEEE
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...
WSC
2008
13 years 7 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
PE
2002
Springer
13 years 4 months ago
2002
Springer
We present procedures and tools for the analysis of network traffic measurements. The tools consist of stand-alone 1 modules that implement advanced statistical analysis procedure...
SCOPES
2004
Springer
13 years 10 months ago
2004
Springer
Abstract. Synthesis of digital signal processing (DSP) software from dataflow-based formal models is an effective approach for tackling the complexity of modern DSP applications. I...