Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva...
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules and task response priorities of ...
Semiconductor industry is capital intensive and competitive, and thus efficiently utilizing resources to provide products and services is essential for maintaining competitive adv...
As the semiconductor industry moves into the next millennium, companies increasingly will be faced with production obstacles that impede their ability to remain competitive. Effec...