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Simulation analysis of cluster tool operations in wafer fabrication

12 years 2 days ago
Simulation analysis of cluster tool operations in wafer fabrication
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamination and less human involvement. Perkinson et al. (1994, 1996) developed analytical models to predict the minimum theoretical time required to complete the cycle in a cluster tool. This paper addresses the verification of these analytical models using simulation. Two simulation models were developed
Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva
Added 02 Oct 2010
Updated 02 Oct 2010
Type Conference
Year 2008
Where WSC
Authors Amit Kumar Gupta, Peter Lendermann, Appa Iyer Sivakumar, John Priyadi
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