A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is ...
Dima Nazzal, Andrew Johnson, Hector J. Carlo, Jesu...
This paper presents a logistic algorithm that improves traffic conditions in a network-like automated material handling system (AMHS). The algorithm uses a lookahead procedure and...
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...
Mathias Schulz, Timothy D. Stanley, Bernhard Renel...