Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...
Simulation is used to verify the feasibility of the design of manufacturing cells. The cell design, which combines new and existing machines in a component manufacture, is present...
Shahram Taj, David S. Cochran, James W. Duda, Joch...
—The manipulation of flexible and limp sheet materials is a common requirement in many industrial manufacturing processes, however automation of even simple tasks involving these...
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundre...
Facility layouts of existing or proposed production systems often form the basis of a dynamic simulation study to prove the design concept and to determine if the required through...