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TASE
2008
IEEE
13 years 4 months ago
2008
IEEE
Abstract--Cluster tools are widely used as semiconductor manufacturing equipment. While throughput analysis and scheduling of single-cluster tools have been well-studied, research ...
ICRA
2007
IEEE
13 years 11 months ago
2007
IEEE
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...