Phase change memory (PCM) has emerged as a promising technology for main memory due to many advan tages, such as better scalability, non-volatility and fast read access. However,...
Lei Jiang, Yu Du, Youtao Zhang, Bruce R. Childers,...
Resolution enhancement techniques (RET) such as optical proximity correction (OPC) and phase-shift mask (PSM) technology are deployed in modern processes to increase the fidelity ...
Luigi Capodieci, Puneet Gupta, Andrew B. Kahng, De...