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    ARVLSI
    1999
    IEEE
    112views VLSI» more  ARVLSI 1999»
    Battery-powered, Wireless MEMS Sensors for High-Sensitivity Chemical and Biological Sensing
    13 years 9 months ago
    Battery-powered, Wireless MEMS Sensors for High-Sensitivity Chemical and Biological Sensing
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    Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chem...
    Charles L. Britton Jr., R. J. Warmack, S. F. Smith...
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