WSC
2007
13 years 7 months ago
2007
Photolithography is generally regarded as the most constraining element in semiconductor manufacturing. This is primarily attributable to the high capital investment and extensive...
ICRA
2007
IEEE
13 years 11 months ago
2007
IEEE
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...