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    Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environmen
    13 years 6 months ago
    Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environmen
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    Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in t...
    Jeffrey W. Herrmann, Brian F. Conaghan, Laurent He...
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