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    ICMENS
    2005
    IEEE
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    LIGA Cavity Resonator for K-Band Applications
    13 years 10 months ago
    LIGA Cavity Resonator for K-Band Applications
    Download  www.trlabs.ca
    A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q...
    Zhen Ma, David M. Klymyshyn, Sven Achenbach
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