ICMENS 2005 NANO MEMS
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Wall of Fame | Most Viewed ICMENS-2005 Paper
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
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