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ICMENS   2005 NANO MEMS
Wall of Fame | Most Viewed ICMENS-2005 Paper
ICMENS
2005
IEEE
294views Hardware» more  ICMENS 2005»
8 years 10 months ago
Optical MEMS pressure sensor using ring resonator on a circular diaphragm
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
Prasant Kumar Pattnaik, Bh. Vijayaaditya, T. Srini...
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