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ICMENS
2005
IEEE
134views Hardware» more  ICMENS 2005»
13 years 10 months ago
Contact Mechanics Description of Inelastic Displacement Response of a Nano-Positioning Device
– A classical mechanistic model was developed to capture the existence of pre-sliding tangential deflection (PSTD) in contacting polysilicon and coated polysilicon surfaces. For ...
Michael J. Starra, E. David Reedy, Alex D. Corwina...