CORR
2008
Springer
13 years 4 months ago
2008
Springer
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro...
CORR
2008
Springer
13 years 4 months ago
2008
Springer
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is appli...