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    ISPD
    1999
    ACM
    88views Hardware» more  ISPD 1999»
    Subwavelength optical lithography: challenges and impact on physical design
    13 years 9 months ago
    Subwavelength optical lithography: challenges and impact on physical design
    Download  vlsicad.ucsd.edu
    We review the implications of subwavelength optical lithography for new tools and ows in the interface between layout design and manufacturability. After discussing the necessity ...
    Andrew B. Kahng, Y. C. Pati
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