A CAD tool for RF MEMS devices

A stable, multiple energy domain and multi scale simulation tool for Microsystems is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The CAD tool developed is a device specific and incorporates physical parameters such as surface roughness. The tool analyzes the impact of surface roughness and also does thermal analysis. These are useful for understanding reliability and failure mechanisms of RF MEMS components.

• Type: Conference
• Year: 2008
• Where: ASPDAC
• Authors: Rajesh Pande, Rajendra Patrikar
• Keywords: ASPDAC 2008, Hardware, MEMS Shunt Switch, RF MEMS, Surface Roughness