22 search results - page 1 / 5 » Application of MEMS technologies to nanodevices |
ISCAS
2003
IEEE
13 years 10 months ago
2003
IEEE
CF
2004
ACM
13 years 10 months ago
2004
ACM
Nanoelectronics research has primarily focused on devices. By contrast, not much has been published on innovations at higher layers: we know little about how to construct circuits...
TIM
2011
12 years 11 months ago
2011
—In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequ...
ICCAD
2006
IEEE
13 years 11 months ago
2006
IEEE
CMOS-MEMS integration can improve the performance of the MEMS (micro-electromechanical systems), allows for smaller packages and leads to a lower packaging and instrumentation cos...
ICCAD
2006
IEEE
14 years 1 months ago
2006
IEEE
Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and co...