—As the application and complexity of microelectromechanical (MEMS) devices increases, there is a corresponding need for automated design and optimization tools to augment engine...
Jason D. Lohn, William F. Kraus, Gregory S. Hornby
Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are nec...
An automated design synthesis system based on a multi-objective genetic algorithm (MOGA) has been developed for the optimization of surface-micromachined MEMS devices. A hierarchi...
Ying Zhang, Raffi R. Kamalian, Alice M. Agogino, C...
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...
Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry...