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» Dummy fill optimization for enhanced manufacturability
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ISPD
2010
ACM
185views Hardware» more  ISPD 2010»
13 years 11 months ago
Dummy fill optimization for enhanced manufacturability
Yaoguang Wei, Sachin S. Sapatnekar
ASPDAC
2007
ACM
123views Hardware» more  ASPDAC 2007»
13 years 8 months ago
Coupling-aware Dummy Metal Insertion for Lithography
As integrated circuits manufacturing technology is advancing into 65nm and 45nm nodes, extensive resolution enhancement techniques (RETs) are needed to correctly manufacture a chip...
Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua ...
DAC
2008
ACM
14 years 5 months ago
ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction
In this paper, we present ELIAD, an efficient lithography aware detailed router to optimize silicon image after optical proximity correction (OPC) in a correct-by-construction man...
Minsik Cho, Kun Yuan, Yongchan Ban, David Z. Pan