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» Failure Mechanisms in MEMS
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ITC
2003
IEEE
109views Hardware» more  ITC 2003»
13 years 10 months ago
Tools and Techniques for Failure Analysis and Qualification of MEMS
Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide str...
Jeremy A. Walraven
CORR
2007
Springer
74views Education» more  CORR 2007»
13 years 5 months ago
Packaging of RF Mems Switching Functions on Alumina Substrate
The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional...
M.-K. El Khatib, Arnaud Pothier, Pierre Blondy
MASCOTS
2004
13 years 7 months ago
Reliability of MEMS-Based Storage Enclosures
MEMS-based storage is a new, non-volatile storage technology currently under development. It promises fast data access, high throughput, high storage density, small physical size,...
Bo Hong, Thomas J. E. Schwarz, Scott A. Brandt, Da...
ITC
2003
IEEE
145views Hardware» more  ITC 2003»
13 years 10 months ago
MEMS Manufacturing Testing: An Accelerometer Case Study
Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering ...
Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis S...
CORR
2008
Springer
84views Education» more  CORR 2008»
13 years 5 months ago
Novel Bonding technologies for wafer-level transparent packaging of MOEMS
Packaging costs of Micro-Electro-Mechanical System (MEMS) are still contributing with >50% to the total costs of most devices. Aligned wafer bonding techniques for Wafer-level ...
Herwig Kirchberger, Paul Lindler, Markus Wimplinge...