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6

ITC
2003
IEEE

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Tools and Techniques for Failure Analysis and Qualification of MEMS

13 years 9 months ago

Tools and Techniques for Failure Analysis and Qualification of MEMS

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Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide structural, chemical, and electrical analysis and how these data aid in qualifying MEMS technologies.

Jeremy A. Walraven

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Hardware | ITC 2003 | MEMS Technologies | MEMS Technology | Various Tools |

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Added	04 Jul 2010
Updated	04 Jul 2010
Type	Conference
Year	2003
Where	ITC
Authors	Jeremy A. Walraven

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