12 search results - page 1 / 3 » Impact of qualification management on scheduling in semicond... |
WSC
2008
13 years 7 months ago
2008
A qualification management software that proposes recipe qualifications on tools in toolsets for semiconductor manufacturing has been developed. The qualification proposals are ba...
WSC
2000
13 years 6 months ago
2000
Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in t...
WSC
2007
13 years 7 months ago
2007
This article deals with an approach for managing scheduling in semiconductor manufacturing facilities. The proposed approach ensures consistency between global and local schedulin...
ICRA
2007
IEEE
13 years 11 months ago
2007
IEEE
— Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manuf...
WSC
2004
13 years 6 months ago
2004
Simulation methods are extensively used in modeling complex scheduling problems. However, traditional layout of simulation models can become complicated when they are used to find...