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WSC
1998
13 years 6 months ago
Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
Simulation modeling provides an effective and powerful approach for capturing and analyzing complex manufacturing systems. More and more decisions are based on computer generated ...
Nirupama Nayani, Mansooreh Mollaghasemi
WSC
2001
13 years 6 months ago
Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing
Semiconductor manufacturing is generally considered a cyclic industry. As such, individual producers able to react quickly and appropriately to market conditions will have a compe...
Charles D. McAllister, Bertan Altuntas, Matthew Fr...
ATAL
2005
Springer
13 years 10 months ago
An agent-based approach for managing symbiotic simulation of semiconductor assembly and test operation
The rapid changing business environment of high-tech asset intensive enterprises such as semiconductor manufacturing constantly drives production managers to look for better solut...
Malcolm Yoke-Hean Low, Kong Wei Lye, Peter Lenderm...
DATE
2009
IEEE
125views Hardware» more  DATE 2009»
13 years 11 months ago
On linewidth-based yield analysis for nanometer lithography
— Lithographic variability and its impact on printability is a major concern in today’s semiconductor manufacturing process. To address sub-wavelength printability, a number of...
Aswin Sreedhar, Sandip Kundu