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ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
Inertial displacement sensors employing currently available high performance micromachined accelerometers and gyroscopes measure position and attitude with sub-micron accuracy for ...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
In this paper we propose and analyse an optical MEMS pressure sensor consisting of a ring resonator located over the edge of a circular silicon diaphragm. As the diaphragm deflec...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
The influence of thermal effects on the reliability of RF MEMS switches is investigated in this paper. Low power consumption and capacity to handle high power at very high frequen...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
– A classical mechanistic model was developed to capture the existence of pre-sliding tangential deflection (PSTD) in contacting polysilicon and coated polysilicon surfaces. For ...
ICMENS
2003
IEEE
13 years 10 months ago
2003
IEEE
Humans throughout history have always sought to mimic the appearance, mobility, functionality, intelligent operation, and thinking process of biological creatures. This field of b...