Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem

Abstract— In this paper, a new type of microsystem is presented : a system able to perform linear and angular motion. First, the microactuator used is studied. An approximation of the working equations is proposed in accordance with FiniteElement simulation. The microactuator used is inserted in the microsystem and a separated modelling of the whole system in linear and in angular motion is given. Stick and skid phases of each motion are independently studied.

• Type: Conference
• Year: 2005
• Where: ICRA
• Authors: Micky Rakotondrabe, Yassine Haddab, Philippe Lutz
• Keywords: Angular Motion, ICRA 2005, Linear, Microsystem, Robotics