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2007

Hierarchical distributed simulation for 300mm wafer fab

4 years 20 days ago
Hierarchical distributed simulation for 300mm wafer fab
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in practice. This paper examines the fundamentals of distributed simulation, and proposes a hierarchical approach to distributed wafer fab simulation, which has the potential to achieve significant reduction in model execution time.
Sheng Xu, Leon F. McGinnis
Added 02 Oct 2010
Updated 02 Oct 2010
Type Conference
Year 2007
Where WSC
Authors Sheng Xu, Leon F. McGinnis
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