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» Double patterning layout decomposition for simultaneous conf...
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ICCAD
2010
IEEE
224views Hardware» more  ICCAD 2010»
13 years 2 months ago
WISDOM: Wire spreading enhanced decomposition of masks in Double Patterning Lithography
In Double Patterning Lithography (DPL), conflict and stitch minimization are two main challenges. Post-routing mask decomposition algorithms [1
Kun Yuan, David Z. Pan
ASPDAC
2010
ACM
637views Hardware» more  ASPDAC 2010»
13 years 2 months ago
A new graph-theoretic, multi-objective layout decomposition framework for double patterning lithography
As Double Patterning Lithography(DPL) becomes the leading candidate for sub-30nm lithography process, we need a fast and lithography friendly decomposition framework. In this pape...
Jae-Seok Yang, Katrina Lu, Minsik Cho, Kun Yuan, D...
ICCAD
2009
IEEE
151views Hardware» more  ICCAD 2009»
13 years 2 months ago
GREMA: Graph reduction based efficient mask assignment for double patterning technology
Double patterning technology (DPT) has emerged as the most hopeful candidate for the next technology node of the ITRS roadmap [1]. The goal of a DPT decomposer is to decompose the...
Yue Xu, Chris Chu
ISPD
2010
ACM
249views Hardware» more  ISPD 2010»
13 years 11 months ago
A matching based decomposer for double patterning lithography
Double Patterning Lithography (DPL) is one of the few hopeful candidate solutions for the lithography for CMOS process beyond 45nm. DPL assigns the patterns less than a certain di...
Yue Xu, Chris Chu