20 search results - page 1 / 4 » MEMS Fabrication |
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEM...
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various ...
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures...
ISCAS
2007
IEEE
13 years 11 months ago
2007
IEEE
—A MEMS accelerometer is proposed as an implantable middle ear microphone for future fully implantable cochlear prosthesis. Vibration characterization of human temporal bones by ...
CORR
2008
Springer
13 years 5 months ago
2008
Springer
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomen...