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9

ITC
2003
IEEE

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Failure Mechanisms in MEMS

13 years 9 months ago

Failure Mechanisms in MEMS

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MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various MEMS components and technologies. MEMS devices fabricated using bulk and surface micromachining process technologies are emphasized.

Jeremy A. Walraven

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Failure Mechanisms | Hardware | ITC 2003 | MEMS Components | Various Mems Components |

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Added	04 Jul 2010
Updated	04 Jul 2010
Type	Conference
Year	2003
Where	ITC
Authors	Jeremy A. Walraven

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