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16

ITC
2003
IEEE

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Future Challenges for MEMS Failure Analysis

13 years 10 months ago

Future Challenges for MEMS Failure Analysis

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MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEMS failure analysis as the field of MEMS (fabrication, component design, and applications) grows. Specific areas of concern for the failure analyst will also be discussed.

Jeremy A. Walraven

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Hardware | ITC 2003 | Mems | MEMS Failure Analysis | MEMS Processes |

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Added	04 Jul 2010
Updated	04 Jul 2010
Type	Conference
Year	2003
Where	ITC
Authors	Jeremy A. Walraven

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