CORR
2007
Springer
13 years 4 months ago
2007
Springer
The expending development of wireless communication requires strong demands for components with improved capabilities. RF MEMS devices offer a variable alternative to conventional...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
CORR
2007
Springer
13 years 4 months ago
2007
Springer
During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck ...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
CORR
2007
Springer
13 years 4 months ago
2007
Springer
This paper is devoted to the analysis of resonant MEMS sensors based on discrete relay feedback techniques. One drawback of such techniques is that some synchronization usually oc...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalentl...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The silicon based sens...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant ...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
This paper considers a developing theory on the effects of inevitable process variations during the fabrication of MEMS and other microsystems. The effects on the performance and ...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
