This paper presents a new extension of the DEVS formalism that allows multiple occurrences of a given instance of a DEVS component. This paper is a follow-up to a previous short p...
Olivier Dalle, Bernard P. Zeigler, Gabriel A. Wain...
Multitrajectory simulation allows explicit management of random events by allowing particular events to be resolved by random draw, by a deterministic choice, or by creating new s...
The exchange of data between different models in a multisimulation environment is about the exchange of information from within the context of two separate worldviews. This amount...
Cluster or chamber tools are often used in the semiconductor industry. In a research environment, moving to smaller device dimensions requires experimentation with new chamber typ...
A typical wafer fab requires numerous decisions for daily operations. Even small decisions on system configurations may have significant impact on the overall fab performance. One...
Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oli...