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DDECS
2009
IEEE

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Contactless characterization of MEMS devices using optical microscopy

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Contactless characterization of MEMS devices using optical microscopy

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András Timár, György Bogn&aacut

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Added	16 Aug 2010
Updated	16 Aug 2010
Type	Conference
Year	2009
Where	DDECS
Authors	András Timár, György Bognár

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