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    DDECS
    2009
    IEEE
    129views Hardware» more  DDECS 2009»

    Contactless characterization of MEMS devices using optical microscopy

    15 years 21 days ago
    Contactless characterization of MEMS devices using optical microscopy
    Download  mycite.omikk.bme.hu
    András Timár, György Bogn&aacut
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    Added 16 Aug 2010
    Updated 16 Aug 2010
    Type Conference
    Year 2009
    Where DDECS
    Authors András Timár, György Bognár
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