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ICRA
2006
IEEE

Hybrid Nanorobotic Approaches for Fabricating NEMS from 3D Helical Nanostructures

14 years 6 months ago
Hybrid Nanorobotic Approaches for Fabricating NEMS from 3D Helical Nanostructures
- Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.
Lixin Dong, Li Zhang, Dominik J. Bell, Bradley J.
Added 11 Jun 2010
Updated 11 Jun 2010
Type Conference
Year 2006
Where ICRA
Authors Lixin Dong, Li Zhang, Dominik J. Bell, Bradley J. Nelson, Detlev Grützmacher
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