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WSC
2008

A review of scheduling theory and methods for semiconductor manufacturing cluster tools

13 years 4 months ago
A review of scheduling theory and methods for semiconductor manufacturing cluster tools
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication processes. We review tool architectures, operational issues, and scheduling requirements. We then explain recent progress in tool science and engineering for scheduling and control of cluster tools.
Tae-Eog Lee
Added 02 Oct 2010
Updated 02 Oct 2010
Type Conference
Year 2008
Where WSC
Authors Tae-Eog Lee
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