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» Failure Mechanisms in MEMS
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ITC
2000
IEEE
79views Hardware» more  ITC 2000»
13 years 10 months ago
Analysis of failure sources in surface-micromachined MEMS
Nilmoni Deb, Ronald D. Blanton
ITC
1998
IEEE
65views Hardware» more  ITC 1998»
13 years 10 months ago
Failure modes for stiction in surface-micromachined MEMS
Abhijeet Kolpekwar, Ronald D. Blanton, David Woodi...
ICRA
2003
IEEE
151views Robotics» more  ICRA 2003»
13 years 11 months ago
Microassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator
This paper describes the process of bonding a MEMS (Micro-ElectroMechanical System) microgripper to the distal end of a robotic manipulator arm using a molten solder bonding techn...
Nikolai Dechev, William L. Cleghorn, James K. Mill...
ICCAD
2002
IEEE
98views Hardware» more  ICCAD 2002»
13 years 11 months ago
Efficient mixed-domain analysis of electrostatic MEMS
—We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are govern...
Gang Li, Narayan R. Aluru
CORR
2007
Springer
158views Education» more  CORR 2007»
13 years 6 months ago
Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
V. Rochus, J.-C. Golinval, C. Louis, C. Mendez, I....